TGXYZ03

Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular SiO2 steps on a Si wafer. The small square in the center with dimensions 500 µm by 500 µm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5 µm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10 µm.

The step height value is calibrated over the whole active area. The actual step height, shown in the individual specifications, may differ slightly from the nominal value. 

Part number
Step height
Pitch, 
Active area, mm
Chip dimensions, mm
Value, nm
Accuracy, %
Value, µm 
Accuracy, µm
TGXYZ01*,
TGXYZ01/NM**
20 2 5 & 10 0.1 1 x 1 5 x 5 x 0.3
TGXYZ02*,
TGXYZ02/NM**
100 3
TGXYZ03*,
TGXYZ03/NM**
500 3

*mounted on a round metal plate with diameter 12mm
**without metal plate

Application

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. One can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights.

For accurate quantification of images of calibration gratings from the TGXYZ series, one can use the calibration option in the Scanning Probe Image Processor (SPIP) designed by Image Metrology.
MikroMasch
Артикул Цена Количество
TGXYZ03 28000
TGXYZ03_NM 28000
890--TGXYZ03 29069.78
890--TGXYZ03-NM 29069.78