Product Description:
The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.


The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects; 
• determination of the tip aspect ratio.

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Part number Mounting Pitch Edge radii, nm  Step height, µm*  Active area, mm  Chip dimensions, mm 
Value, µm Accuracy, µm
mounted on a round metal plate with diameter 12mm  3 0.1 < 5 1 1 x 1 5 x 5 x 0.3
TGX/NM without metal plate 3 0.1 < 5 1 1 x 1 5 x 5 x 0.3
* The step height value is given for information only, not for vertical calibration purposes.
Артикул Цена Количество
TGX 28000
TGX_NM 28000
886--TGX 29069.78
886--TGX-NM 29069.78