SuperSharp, Special Tapping Mode AFM Probe

Metrology Probe MSS SuperSharp PatternedMedia

Tilt compensated. Supersharp, high aspect ratio probe for very fine features such as patterned media. Soft tapping mode cantilever. 

Multipurpose high resolution probe with excellent lifetime and reliability. The nanotools® MSS_FMR_3 tip is designed for non-contact, soft tapping/force modulation microscopy. It delivers outstanding resolution in critical AFM applications even on hard, tip eating samples like HDD, ceramics, silicon oxide/nitride, polysilicon to name a few.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC), thus offering the extreme durability of diamond together with high resolution imaging capability. The stiffness/Youngs modulus is 8 x of that of silicon. Applying our patented EBD (electron beam deposition) technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

A 100 % quality check by SEM for every tip, high scan speeds, flexibility in combination with stiffness, 13 deg tilt compensation and optimized cost per scan are key parameters.

- EBD tip on pointprobe FMR/FESPA AFM cantilever
- tilt compensation: 3 deg +/-1 deg
- length of the high aspect ratio spike: 300 nm
- diameter at 300 nm tip length: 30 nm (1:10 aspect ratio)
- tip shape: conical, rotation-symmetric
- excellent tip radius: < 3 nm, typically 2 nm
- 100 % SEM check; good tip guarantee.
- high mechanical Q-factor for high sensitivity.
- fits into automated AFM tools (in fab/in line)


shape: Supersharp, EBD

height 0.4 µm 0.3 - 0.5 µm -
radius 2 nm - 5 nm
half_cone_angle - - -


shape: beam

length 225 µm 215 - 235 µm -
width 28 µm 20 - 35 µm -
thikness 3 µm 2 - 4 µm -
force_constant 2.8 N/m 0.5 - 0.5 N/m -
resonance_frequency 75 kHz 45 - 115 kHz -
Артикул Цена Количество
637--MSS_FMR_3-5 123357.02
637--MSS_FMR_3-25 524209.51
637--ESD-Kit 15374.42