MC90-70_ArrowNCR_3

High-Aspect-Ratio, Tilt Compensated Special Tapping Mode AFM Probe

The nanotools® MC90/70 probes feature a perfectly cylindrical tip shape providing the highest repeatability of depth and bottom width measurements (constant bottom travel distance). The MC90/70 high aspect ratio probes are the AFM in-line metrology solution for 90 nm and 70 nm. They are tilt compensated and are available for most AFM systems.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC).

• high aspect ratio
• hydrophobic surface properties
• high stiffness/elastic modulus (8 x of that of silicon)
• low thermal mass
• abrasion resistance

tip spec:

shape:                     cylindrical
length:                     800 nm +/-200 nm
diameter:                55 nm +/-5 nm
tilt compensation:   3 deg +/- 1 deg

Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD techninque we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

tip

shape: EBD, Cylindrical, Arrow, High-Aspect-Ratio

typicalfrom_toguaranteed
height 0.8 µm 0.6 - 1 µm -
radius 5 nm - 7 nm

cantilever

shape: beam

typicalfrom_toguaranteed
length 160 µm 155 - 165 µm -
width 45 µm 40 - 50 µm -
thikness 4.6 µm 4.1 - 5.1 µm -
force_constant 42 N/m 27 - 27 N/m -
resonance_frequency 285 kHz 240 - 380 kHz -
NanoTools
Артикул Цена Количество
636--MC90-70_ArrowNCR_3-5 218697.76
636--MC90-70_ArrowNCR_3-25 948139.92
636--ESD-Kit 15374.42