M1-ESD_NCH_13

High-Aspect-Ratio, Tilt Compensated Special Tapping Mode AFM Probe

The nanotools® M1-ESD_NCH_13 probes are designed for non-contact/ high frequency mode, in particular for automated AFM systems for in-line process control as well as general purpose AFM. Its  special anti-ESD coating delivers metallic conductivity of the probe without weakening its mechanical strength.

Some applications such as scanning ceramics or photomasks require an even higher level of ESD precautions. Therefor the nanotools® M1-ESD_NCH_13 is the choice. Key features are excellent lifetime and reliability for high aspect ratio applications where charging of the sample is an issue.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC).

- high aspect ratio
- hydrophobic surface properties
- high stiffness/elastic modulus (8 x of that of silicon)
- low thermal mass
- abrasion resistance EBD tip on NCH / TESP AFM cantilever
- high mechanical Q-factor for high sensitivity.
- high lifetime substitute for silicon FIB

- shape:                      conical, rotation-symmetric
- length:                      800 nm +/- 200 nm
- diameter:                  75 nm +/- 10 nm
- tip radius:                 < 10 nm, typically 5 nm
- tilt compensation:      13 deg +/- 1 deg

Applying our patented EBD techninque we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

tip

shape: Cone Shaped

typicalfrom_toguaranteed
height 0.8 µm 0.6 - 1 µm -
radius 5 nm - 10 nm

cantilever

shape: beam

typicalfrom_toguaranteed
length 125 µm 120 - 130 µm -
width 30 µm 25 - 35 µm -
thikness 4 µm 3.5 - 4.5 µm -
force_constant 42 N/m 21 - 21 N/m -
resonance_frequency 320 kHz 250 - 390 kHz -
NanoTools
Артикул Цена Количество
389--M1-ESD_NCH_13-5 183669.26
389--M1-ESD_NCH_13-25 821721.26
389--ESD-Kit 15374.42