IVPS

Product Description:

Line with vertical, parallel sidewalls


Layout:

88 cells on 1 x 1 mm area on 6 x 6 silicon chip


Specifications: 


- Material: Silicon 
- Width of line: 0.8 µm ± 15 % 
- Depth of line: 1 µm ± 15 % 
- Surface/sidewall angle: < 90° ± 0,5° 
- Sidewall parallelity: < 1° 
- Top corner radius: < 10 nm 
- Edge roughness: < 5 nm 

Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.
Team Nanotec
Артикул Цена Количество
IVPS 100646.16
689--IVPS 227757.76