EBD2-100_NCH_13

High-Aspect-Ratio, Tilt Compensated Special Tapping Mode AFM Probe

Multipurpose High Aspect Ratio and High Resolution EBD probe

The nanotools® EBD2-100 tip is designed for non-contact / high frequency mode, in particular for automated AFM systems for in-line process control and general purpose AFM. Excellent lifetime and reliability are key features. The EBD3D2-100 is a perfect choice for deep trench measurements as well as getting detailed information about step height.

Applying our patented EBD techninque we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

 

EBD Material

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC). The tips show superior properties:

• high aspect ratio
• hydrophobic surface properties
• high stiffness/elastic modulus (8x of that of silicon)
• low thermal mass
• abrasion resistance

Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

spike

shape: undefined

typicalfrom_toguaranteed
shape - - -
length 2000 nm 2000 - 2600 nm -
width 100 nm 80 - 100 nm -
width - - -
half_cone_angle - - -
sharpness 5 nm - -
tilt_compensation 13 - -

tip

shape: EBD, High-Aspect-Ratio

typicalfrom_toguaranteed
height 15 µm 10 - 15 µm -
setback 15 µm 5 - 25 µm -

cantilever

shape: beam

typicalfrom_toguaranteed
length 125 µm 115 - 135 µm -
width 35 µm 30 - 40 µm -
thikness 4 µm 3 - 5 µm -
force_constant 40 N/m 20 - 20 N/m -
resonance_frequency 340 kHz 315 - 365 kHz -
NanoTools
Артикул Цена Количество
630--EBD2-100_NCH_13-5 108081.44
630--EBD2-100_NCH_13-25 458366.46
630--ESD-Kit 15374.42